Research on Sapphire Deep Cavity Corrosion and Mask Selection Technology

Research on Sapphire Deep Cavity Corrosion and Mask Selection Technology

Aimed at the problem of the small wet etching depth in sapphire microstructure processing technology, a multilayer composite mask layer is proposed. The thickness of the mask layer is studied, combined with the corrosion rate of different materials on sapphire in the sapphire etching solution, diffe...

Full description

Bibliographic Details
Main Authors: Yiingqi Shang, Hongquan Zhang, Yan Zhang
Format: Article
Language:English
Published: MDPI AG 2021-01-01
Series:Micromachines
Subjects:
wet etching
sapphire
mask layer
Online Access:https://www.mdpi.com/2072-666X/12/2/136

Similar Items

Similar Items