Research on Sapphire Deep Cavity Corrosion and Mask Selection Technology

Aimed at the problem of the small wet etching depth in sapphire microstructure processing technology, a multilayer composite mask layer is proposed. The thickness of the mask layer is studied, combined with the corrosion rate of different materials on sapphire in the sapphire etching solution, diffe...

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Bibliographic Details
Main Authors: Yiingqi Shang, Hongquan Zhang, Yan Zhang
Format: Article
Language:English
Published: MDPI AG 2021-01-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/12/2/136