Modeling and Control for Deadlock-Free Operation of Single-Arm Cluster Tools With Concurrently Processing Multiple Wafer Types via Petri Net
Nowadays, cluster tools tend to concurrently process multiple types of wafers with similar recipes in order to improve their utilization and flexibility in semiconductor manufacturing. Different wafer types may have different wafer flow patterns, resulting in that cluster tools are deadlock-prone. I...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2021-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9422735/ |