Optical waveguides fabricated in atomic layer deposited Al2O3 by ultrafast laser ablation

Optical waveguides fabricated in atomic layer deposited Al2O3 by ultrafast laser ablation

We report on the fabrication of optical waveguides by ultrafast laser ablation of Al2O3. First, a thin film was grown by atomic layer deposition (ALD) on fused silica substrate, followed by laser ablation micromachining the surface material in order to produce a rib waveguide. A multimode behavior o...

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Bibliographic Details
Main Authors: Eder German Lizarraga-Medina, Gabriel R. Castillo, Jorge Adolfo Jurado, Diana Laura Caballero-Espitia, Santiago Camacho-Lopez, Oscar Contreras, Ricardo Santillan, Heriberto Marquez, Hugo Tiznado
Format: Article
Language:English
Published: Elsevier 2021-01-01
Series:Results in Optics
Subjects:
Optical waveguides
Ultrafast laser ablation
Atomic layer deposition
Online Access:http://www.sciencedirect.com/science/article/pii/S2666950121000080

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http://www.sciencedirect.com/science/article/pii/S2666950121000080

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