Modeling and Electrical Characterization of a Bilayer Pt/AlN/Sapphire One Port Resonator for Sensor Applications

Modeling and Electrical Characterization of a Bilayer Pt/AlN/Sapphire One Port Resonator for Sensor Applications

This paper presents a two-dimensional FEM (Finite Element Method) modeling and simulation of a surface acoustic wave (SAW) resonator based on a layered Pt/AlN/Sapphire structure. Such structure that exploits the electromechanical coupling of piezoelectric film is of high interest for harsh environme...

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Bibliographic Details
Main Authors: Asseko Ondo Jean Claude, Blampain Eloi Jean Jacques, N’tchayi Mbourou Gaston, Traore Ndama Adoum, Obame Ndong Elysée, Elmazria Omar
Format: Article
Language:English
Published: MDPI AG 2021-02-01
Series:Electronics
Subjects:
FEM
SAW
resonator
piezoelectric material
IDT
aluminum nitride
Online Access:https://www.mdpi.com/2079-9292/10/4/370

Internet

https://www.mdpi.com/2079-9292/10/4/370

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