Vibration Characteristic Measurement Method of MEMS Gyroscopes in Vacuum, High and Low Temperature Environment and Verification of Excitation Method
A method for measuring vibration characteristics of MEMS (Micro Electro Mechanical System) is presented. This method aims to simulate a real environment where MEMS operates. At first, the method of applying high and low temperature in a vacuum environment is studied. And the excitation method applyi...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2021-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9535110/ |