Design and Development of Polysilicon-based Microhotplate for Gas Sensing Application
The paper presents the design and development of a polysilicon-based microhotplate (MHP) on a SiO2 membrane formed by bulk micromachining in <100> orientation P-type silicon. The chip comprises four microheater cells, which can be used separately or in series combination. The chip size is 2.1...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2009-04-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_09/P_411.pdf |