A flexible model for studying fringe field effect on parallel plate actuators

A flexible model for studying fringe field effect on parallel plate actuators

Abstract Electrostatic parallel plate actuators are common in micro-electro-mechanical systems due to their compatibility with micro-fabrication technology. Parallel plate actuators suffer from an instability problem called the pull-in phenomenon that happens when the applied DC voltage exceeds a ce...

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Bibliographic Details
Main Authors: Ahmad Elshenety, E. E. El-Kholy, Ahmed F. Abdou, Mostafa Soliman, Mohsen M. Elhagry
Format: Article
Language:English
Published: SpringerOpen 2020-09-01
Series:Journal of Electrical Systems and Information Technology
Subjects:
MEMS
Parallel plate actuators
Pull-in voltage
Fringe field
MATLAB Simulink
ANSYS
Online Access:http://link.springer.com/article/10.1186/s43067-020-00022-7

Internet

http://link.springer.com/article/10.1186/s43067-020-00022-7

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