Efficient Optomechanical Mode-Shape Mapping of Micromechanical Devices

Efficient Optomechanical Mode-Shape Mapping of Micromechanical Devices

Visualizing eigenmodes is crucial in understanding the behavior of state-of-the-art micromechanical devices. We demonstrate a method to optically map multiple modes of mechanical structures simultaneously. The fast and robust method, based on a modified phase-lock loop, is demonstrated on a silicon...

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Bibliographic Details
Main Authors: David Hoch, Kevin-Jeremy Haas, Leopold Moller, Timo Sommer, Pedro Soubelet, Jonathan J. Finley, Menno Poot
Format: Article
Language:English
Published: MDPI AG 2021-07-01
Series:Micromachines
Subjects:
optomechanics
mode-mapping
MEMS
phase-lock loop
silicon-nitride
membrane
Online Access:https://www.mdpi.com/2072-666X/12/8/880

Internet

https://www.mdpi.com/2072-666X/12/8/880

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