A Resonant Pressure Microsensor with the Measurement Range of 1 MPa Based on Sensitivities Balanced Dual Resonators

A Resonant Pressure Microsensor with the Measurement Range of 1 MPa Based on Sensitivities Balanced Dual Resonators

This paper presents a resonant pressure microsensor with the measurement range of 1 MPa suitable for the soaring demands of industrial gas pressure calibration equipment. The proposed microsensor consists of an SOI layer as a sensing element and a glass cap for vacuum packaging. The sensing elements...

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Bibliographic Details
Main Authors: Yulan Lu, Pengcheng Yan, Chao Xiang, Deyong Chen, Junbo Wang, Bo Xie, Jian Chen
Format: Article
Language:English
Published: MDPI AG 2019-05-01
Series:Sensors
Subjects:
resonant pressure microsensor
1 MPa
dual resonators
sensitivity
Online Access:https://www.mdpi.com/1424-8220/19/10/2272

Internet

https://www.mdpi.com/1424-8220/19/10/2272

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