Measurement of Nanometre-Scale Gate Oxide Thicknesses by Energy-Dispersive X-ray Spectroscopy in a Scanning Electron Microscope Combined with Monte Carlo Simulations

Measurement of Nanometre-Scale Gate Oxide Thicknesses by Energy-Dispersive X-ray Spectroscopy in a Scanning Electron Microscope Combined with Monte Carlo Simulations

A procedure based on energy-dispersive X-ray spectroscopy in a scanning electron microscope (SEM-EDXS) is proposed to measure ultra-thin oxide layer thicknesses to atomic scale precision in top-down instead of cross-sectional geometry. The approach is based on modelling the variation of the electron...

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Bibliographic Details
Main Author: Thomas Walther
Format: Article
Language:English
Published: MDPI AG 2021-08-01
Series:Nanomaterials
Subjects:
energy-dispersive X-ray spectroscopy (EDXS)
scanning electron microscopy (SEM)
penetration depth
oxide thickness
gate oxides
Online Access:https://www.mdpi.com/2079-4991/11/8/2117

Internet

https://www.mdpi.com/2079-4991/11/8/2117

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