Experimental Research on Fluid Coupling Flexible Actuator
In the field of micromechanics, piezoelectric actuator has attracted great attention for its high-frequency response, high displacement resolution, and high output force. However, its prospect of practical application has been largely limited by the displacement of micrometer. A fluid coupling flexi...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2018-02-01
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Series: | Micromachines |
Subjects: | |
Online Access: | http://www.mdpi.com/2072-666X/9/3/103 |