Experimental Research on Fluid Coupling Flexible Actuator

In the field of micromechanics, piezoelectric actuator has attracted great attention for its high-frequency response, high displacement resolution, and high output force. However, its prospect of practical application has been largely limited by the displacement of micrometer. A fluid coupling flexi...

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Bibliographic Details
Main Authors: Xiangli Zeng, Yue Wu, Qianjin Tu, Jingshi Dong, Zhigang Yang, Xinbo Li
Format: Article
Language:English
Published: MDPI AG 2018-02-01
Series:Micromachines
Subjects:
Online Access:http://www.mdpi.com/2072-666X/9/3/103