Simulation of Main Plasma Parameters of a Cylindrical Asymmetric Capacitively Coupled Plasma Micro-Thruster using Computational Fluid Dynamics
Computational fluid dynamics (CFD) simulations of a radio-frequency (13.56 MHz) electro-thermal capacitively coupled plasma (CCP) micro-thruster have been performed using the commercial CFD-ACE+ package. Standard operating conditions of a 10 W, 1.5 Torr argon discharge were used to compare with prev...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Frontiers Media S.A.
2015-01-01
|
| Series: | Frontiers in Physics |
| Subjects: | |
| Online Access: | http://journal.frontiersin.org/Journal/10.3389/fphy.2014.00080/full |