Low-Damage Reactive Ion Etching of Nanoplasmonic Waveguides with Ultrathin Noble Metal Films

Low-Damage Reactive Ion Etching of Nanoplasmonic Waveguides with Ultrathin Noble Metal Films

Nanoplasmonic waveguides utilizing surface plasmon polaritons (SPPs) propagation have been investigated for more than 15 years and are now well understood. Many researchers make their efforts to find the best ways of using light and overcoming the speed limit of integrated circuits by means of SPPs....

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Bibliographic Details
Main Authors: Alina A. Dobronosova, Anton I. Ignatov, Olga S. Sorokina, Nikolay A. Orlikovskiy, Michail Andronik, Aleksey R. Matanin, Kirill O. Buzaverov, Daria A. Ezenkova, Sergey A. Avdeev, Dimitry A. Baklykov, Vitaly V. Ryzhkov, Aleksander M. Merzlikin, Aleksander V. Baryshev, Ilya A. Ryzhikov, Ilya A. Rodionov
Format: Article
Language:English
Published: MDPI AG 2019-10-01
Series:Applied Sciences
Subjects:
nanoplasmonic waveguide
plasmonic nanocircuitry
low-damage alumina etch
multilayer waveguide
noble metals etching
multilayer stack etching
Online Access:https://www.mdpi.com/2076-3417/9/20/4441

Internet

https://www.mdpi.com/2076-3417/9/20/4441

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