Vibration Control of Flexible Mode for a Beam-Type Substrate Transport Robot
Beam-type substrate transport robots are widely used to handle substrates, especially in the solar cell manufacturing process. To reduce the takt time and increase productivity, accurate position control becomes increasingly important as the size of the substrate increases. However, the vibration ca...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2013-07-01
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| Series: | International Journal of Advanced Robotic Systems |
| Online Access: | https://doi.org/10.5772/56752 |