Processing of Graphene combining Optical Detection and Scanning Probe Lithography

Processing of Graphene combining Optical Detection and Scanning Probe Lithography

This paper presents an experimental setup tailored for robotic processing of graphene with in-situ vision based control. A robust graphene detection approach is presented applying multiple image processing operations of the visual feedback provided by a high-resolution light microscope. Detected gra...

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Main Authors: Zimmermann Sören, van Düllen Alexander, Wieghaus Markus, Fatikow Sergej
Format: Article
Language:English
Published: EDP Sciences 2015-01-01
Series:MATEC Web of Conferences
Online Access:http://dx.doi.org/10.1051/matecconf/20153203001
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spelling doaj-1bbf76c27ac1466ba0438ca29ba990f52021-02-02T05:03:15ZengEDP SciencesMATEC Web of Conferences2261-236X2015-01-01320300110.1051/matecconf/20153203001matecconf_isot2015_03001Processing of Graphene combining Optical Detection and Scanning Probe LithographyZimmermann Sören0van Düllen Alexander1Wieghaus Markus2Fatikow Sergej3Division Microrobotics and Control Engineering, University of OldenburgDivision Microrobotics and Control Engineering, University of OldenburgDivision Microrobotics and Control Engineering, University of OldenburgDivision Microrobotics and Control Engineering, University of OldenburgThis paper presents an experimental setup tailored for robotic processing of graphene with in-situ vision based control. A robust graphene detection approach is presented applying multiple image processing operations of the visual feedback provided by a high-resolution light microscope. Detected graphene flakes can be modified using a scanning probe based lithographical process that is directly linked to the in-situ optical images. The results of this process are discussed with respect to further application scenarios.http://dx.doi.org/10.1051/matecconf/20153203001
collection DOAJ
language English
format Article
sources DOAJ
author Zimmermann Sören
van Düllen Alexander
Wieghaus Markus
Fatikow Sergej
spellingShingle Zimmermann Sören
van Düllen Alexander
Wieghaus Markus
Fatikow Sergej
Processing of Graphene combining Optical Detection and Scanning Probe Lithography
MATEC Web of Conferences
author_facet Zimmermann Sören
van Düllen Alexander
Wieghaus Markus
Fatikow Sergej
author_sort Zimmermann Sören
title Processing of Graphene combining Optical Detection and Scanning Probe Lithography
title_short Processing of Graphene combining Optical Detection and Scanning Probe Lithography
title_full Processing of Graphene combining Optical Detection and Scanning Probe Lithography
title_fullStr Processing of Graphene combining Optical Detection and Scanning Probe Lithography
title_full_unstemmed Processing of Graphene combining Optical Detection and Scanning Probe Lithography
title_sort processing of graphene combining optical detection and scanning probe lithography
publisher EDP Sciences
series MATEC Web of Conferences
issn 2261-236X
publishDate 2015-01-01
description This paper presents an experimental setup tailored for robotic processing of graphene with in-situ vision based control. A robust graphene detection approach is presented applying multiple image processing operations of the visual feedback provided by a high-resolution light microscope. Detected graphene flakes can be modified using a scanning probe based lithographical process that is directly linked to the in-situ optical images. The results of this process are discussed with respect to further application scenarios.
url http://dx.doi.org/10.1051/matecconf/20153203001
work_keys_str_mv AT zimmermannsoren processingofgraphenecombiningopticaldetectionandscanningprobelithography
AT vandullenalexander processingofgraphenecombiningopticaldetectionandscanningprobelithography
AT wieghausmarkus processingofgraphenecombiningopticaldetectionandscanningprobelithography
AT fatikowsergej processingofgraphenecombiningopticaldetectionandscanningprobelithography
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