Processing of Graphene combining Optical Detection and Scanning Probe Lithography

This paper presents an experimental setup tailored for robotic processing of graphene with in-situ vision based control. A robust graphene detection approach is presented applying multiple image processing operations of the visual feedback provided by a high-resolution light microscope. Detected gra...

Full description

Bibliographic Details
Main Authors: Zimmermann Sören, van Düllen Alexander, Wieghaus Markus, Fatikow Sergej
Format: Article
Language:English
Published: EDP Sciences 2015-01-01
Series:MATEC Web of Conferences
Online Access:http://dx.doi.org/10.1051/matecconf/20153203001