Fabrication of Convex PDMS–Parylene Microstructures for Conformal Contact of Planar Micro-Electrode Array

Polymer-based micro-electrode arrays (MEAs) are gaining attention as an essential technology to understand brain connectivity and function in the field of neuroscience. However, polymer based MEAs may have several challenges such as difficulty in performing the etching process, difficulty of micro-p...

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Bibliographic Details
Main Authors: Woo Ram Lee, Changkyun Im, Hae-Yong Park, Jong-Mo Seo, Jun-Min Kim
Format: Article
Language:English
Published: MDPI AG 2019-09-01
Series:Polymers
Subjects:
Online Access:https://www.mdpi.com/2073-4360/11/9/1436