Effect of Substrate Type on the Fractal Characteristics of AFM Images of Sputtered Aluminium Thin Films
The roughness features of aluminum thin films deposited by radio-frequency magnetron sputtering on Ti6Al4V, stainless steel, mild steel and commercially pure titanium substrates are studied via atomic force microscopy. The average roughness, interface width, skewness, kurtosis, roughness exponent, e...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
Kaunas University of Technology
2019-11-01
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Series: | Medžiagotyra |
Subjects: | |
Online Access: | http://matsc.ktu.lt/index.php/MatSc/article/view/22769 |