Quantification of High Resolution Pulsed RF GDOES Depth Profiles for Mo/B<sub>4</sub>C/Si Nano-Multilayers

Quantification of High Resolution Pulsed RF GDOES Depth Profiles for Mo/B<sub>4</sub>C/Si Nano-Multilayers

Pulsed-radio frequency glow discharge optical emission spectrometry (Pulsed-RF-GDOES) has exhibited great potential for high resolution (HR) depth profiling. In this paper, the measured GDOES depth profile of 60 × Mo (3 nm)/B<sub>4</sub>C (0.3 nm)/Si (3.7 nm) was quantified by employing...

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Bibliographic Details
Main Authors: Hao Yang, Songyou Lian, Patrick Chapon, Yibing Song, Jiangyong Wang, Congkang Xu
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Coatings
Subjects:
GDOES depth profiling
preferential sputtering
MRI model
nano-multilayers
Online Access:https://www.mdpi.com/2079-6412/11/6/612

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https://www.mdpi.com/2079-6412/11/6/612

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