A Study on Suppressing Crosstalk Through a Thick SOI Substrate and Deep Trench Isolation
Measurement and simulation studies are conducted on transmission crosstalk in thick silicon-on-insulator substrates. This paper focuses on the role of buried oxide layers and deep trench isolation in suppressing crosstalk. With radio frequency coupling paths on substrates depending on noise frequenc...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2013-01-01
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| Series: | IEEE Journal of the Electron Devices Society |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/6595597/ |