Digital Platform for Wafer-Level MEMS Testing and Characterization Using Electrical Response

Digital Platform for Wafer-Level MEMS Testing and Characterization Using Electrical Response

The uniqueness of microelectromechanical system (MEMS) devices, with their multiphysics characteristics, presents some limitations to the borrowed test methods from traditional integrated circuits (IC) manufacturing. Although some improvements have been performed, this specific area still lags behin...

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Bibliographic Details
Main Authors: Nuno Brito, Carlos Ferreira, Filipe Alves, Jorge Cabral, João Gaspar, João Monteiro, Luís Rocha
Format: Article
Language:English
Published: MDPI AG 2016-09-01
Series:Sensors
Subjects:
microelectromechanical devices
microprocessors
field programmable gate arrays
Online Access:http://www.mdpi.com/1424-8220/16/9/1553

Internet

http://www.mdpi.com/1424-8220/16/9/1553

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