Analysis of the Dynamic Characteristics of a Micro-Piezoelectric Bimorph Beam Based on an Admittance Test

Analysis of the Dynamic Characteristics of a Micro-Piezoelectric Bimorph Beam Based on an Admittance Test

A piezoelectric bimorph beam, as an upgraded cantilever beam structure, can be used to detect gas content and build a micro-actuator, among other functions. Thus, this beam is widely applied to microelectromechanical systems (MEMS), transformers, and precision machinery. For example, when photoacous...

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Bibliographic Details
Main Authors: Tianxiang Zheng, Shuo Chen, Linxu Lei, Zhanfeng Deng, Cheng Zhang, Xing Yang, Haodong Zou, Menghan Xu
Format: Article
Language:English
Published: MDPI AG 2017-07-01
Series:Micromachines
Subjects:
microelectromechanical systems (MEMS)
bimorph beams
dynamic characteristics
resonant frequency
equivalent circuit
admittance
Online Access:https://www.mdpi.com/2072-666X/8/7/220

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https://www.mdpi.com/2072-666X/8/7/220

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