Ab initio study for molecular-scale adsorption, decomposition and desorption on AlN surfaces during MOCVD growth
Abstract Since AlGaN offers new opportunities for the development of the solid state ultraviolet (UV) luminescence, detectors and high-power electronic devices, the growth of AlN buffer substrate is concerned. However, the growth of AlN buffer substrate during MOCVD is regulated by an intricate inte...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2020-10-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-020-72973-w |