Process Oxygen Flow Influence on the Structural Properties of Thin Films Obtained by Co-Sputtering of (TeO<sub>2</sub>)<sub>x</sub>-ZnO and Au onto Si Substrates

Process Oxygen Flow Influence on the Structural Properties of Thin Films Obtained by Co-Sputtering of (TeO<sub>2</sub>)<sub>x</sub>-ZnO and Au onto Si Substrates

In this study, we investigated the structural properties of TeO<sub>2</sub>-ZnO (TZ) and TeO<sub>2</sub>-ZnO-Au (TZA) thin films sputtered under different oxygen concentrations and either annealed or not annealed at 325 °C in air for 10 or 20 h. The lattice changes of the tel...

Full description

Bibliographic Details
Main Authors: Leonardo Bontempo, Sebastião G. dos Santos Filho, Luciana R. P. Kassab
Format: Article
Language:English
Published: MDPI AG 2020-09-01
Series:Nanomaterials
Subjects:
tellurate
gold nanoparticles
thin films
co-sputtering
TeO<sub>2</sub> phases
Online Access:https://www.mdpi.com/2079-4991/10/9/1863

Internet

https://www.mdpi.com/2079-4991/10/9/1863

Similar Items