Design, Modeling, and Characterization of a Bionically Inspired Integrated Micro-Flapper for Cooling and Venting Applications
A novel, integrated micromechanical actuator based on the principle of undulatory fish locomotion and intended for efficient on-chip cooling or venting applications is conceived and designed for an aluminum nitride-based thin-film technology applying coupled piezoelectric, mechanical, and fluidic an...
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MDPI AG
2017-08-01
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| Online Access: | https://www.mdpi.com/2504-3900/1/4/372 |
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doaj-190c606c15f24fc48b4ab19904d3c2682020-11-24T23:23:53ZengMDPI AGProceedings2504-39002017-08-011437210.3390/proceedings1040372proceedings1040372Design, Modeling, and Characterization of a Bionically Inspired Integrated Micro-Flapper for Cooling and Venting ApplicationsRegine Behlert0Matthias Gehring1Hannes Mehner2Robert Wieland3Gabriele Schrag4Institute for Physics of Electrotechnology, Technical University of Munich, 80333 München, GermanyInstitute for Physics of Electrotechnology, Technical University of Munich, 80333 München, GermanyMicromechanical Systems Group, Technical University Ilmenau, 98693 Ilmenau, GermanyFraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT, Munich, GermanyInstitute for Physics of Electrotechnology, Technical University of Munich, 80333 München, GermanyA novel, integrated micromechanical actuator based on the principle of undulatory fish locomotion and intended for efficient on-chip cooling or venting applications is conceived and designed for an aluminum nitride-based thin-film technology applying coupled piezoelectric, mechanical, and fluidic analyses. The results of the investigations prove that an undulatory motion of the fin-like micro-flapper yields a significant higher, directed fluidic net flow compared to resonant-like motion. First prototypes have been manufactured and characterized applying laser Doppler vibrometry (LDV).https://www.mdpi.com/2504-3900/1/4/372piezoelectricityfluidic actuatorlaser doppler vibrometrythin-film technology |
| collection |
DOAJ |
| language |
English |
| format |
Article |
| sources |
DOAJ |
| author |
Regine Behlert Matthias Gehring Hannes Mehner Robert Wieland Gabriele Schrag |
| spellingShingle |
Regine Behlert Matthias Gehring Hannes Mehner Robert Wieland Gabriele Schrag Design, Modeling, and Characterization of a Bionically Inspired Integrated Micro-Flapper for Cooling and Venting Applications Proceedings piezoelectricity fluidic actuator laser doppler vibrometry thin-film technology |
| author_facet |
Regine Behlert Matthias Gehring Hannes Mehner Robert Wieland Gabriele Schrag |
| author_sort |
Regine Behlert |
| title |
Design, Modeling, and Characterization of a Bionically Inspired Integrated Micro-Flapper for Cooling and Venting Applications |
| title_short |
Design, Modeling, and Characterization of a Bionically Inspired Integrated Micro-Flapper for Cooling and Venting Applications |
| title_full |
Design, Modeling, and Characterization of a Bionically Inspired Integrated Micro-Flapper for Cooling and Venting Applications |
| title_fullStr |
Design, Modeling, and Characterization of a Bionically Inspired Integrated Micro-Flapper for Cooling and Venting Applications |
| title_full_unstemmed |
Design, Modeling, and Characterization of a Bionically Inspired Integrated Micro-Flapper for Cooling and Venting Applications |
| title_sort |
design, modeling, and characterization of a bionically inspired integrated micro-flapper for cooling and venting applications |
| publisher |
MDPI AG |
| series |
Proceedings |
| issn |
2504-3900 |
| publishDate |
2017-08-01 |
| description |
A novel, integrated micromechanical actuator based on the principle of undulatory fish locomotion and intended for efficient on-chip cooling or venting applications is conceived and designed for an aluminum nitride-based thin-film technology applying coupled piezoelectric, mechanical, and fluidic analyses. The results of the investigations prove that an undulatory motion of the fin-like micro-flapper yields a significant higher, directed fluidic net flow compared to resonant-like motion. First prototypes have been manufactured and characterized applying laser Doppler vibrometry (LDV). |
| topic |
piezoelectricity fluidic actuator laser doppler vibrometry thin-film technology |
| url |
https://www.mdpi.com/2504-3900/1/4/372 |
| work_keys_str_mv |
AT reginebehlert designmodelingandcharacterizationofabionicallyinspiredintegratedmicroflapperforcoolingandventingapplications AT matthiasgehring designmodelingandcharacterizationofabionicallyinspiredintegratedmicroflapperforcoolingandventingapplications AT hannesmehner designmodelingandcharacterizationofabionicallyinspiredintegratedmicroflapperforcoolingandventingapplications AT robertwieland designmodelingandcharacterizationofabionicallyinspiredintegratedmicroflapperforcoolingandventingapplications AT gabrieleschrag designmodelingandcharacterizationofabionicallyinspiredintegratedmicroflapperforcoolingandventingapplications |
| _version_ |
1725563048267087872 |