Design, Modeling, and Characterization of a Bionically Inspired Integrated Micro-Flapper for Cooling and Venting Applications
A novel, integrated micromechanical actuator based on the principle of undulatory fish locomotion and intended for efficient on-chip cooling or venting applications is conceived and designed for an aluminum nitride-based thin-film technology applying coupled piezoelectric, mechanical, and fluidic an...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-08-01
|
| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/1/4/372 |