Kinetics of Ni:C Thin Film Composition Formation at Different Temperatures and Fluxes
In this work analysis considering Ni:C thin films growth on thermaly oxidized Si substrate by proposed kinetic model is presented. Model is built considering experimental results where microstructure evolution as a function of the substrate temperature and metal content of Ni:C nanocomposite films g...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Kaunas University of Technology
2013-09-01
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| Series: | Medžiagotyra |
| Subjects: | |
| Online Access: | http://matsc.ktu.lt/index.php/MatSc/article/view/5234 |