Identification of Capacitive MEMS Accelerometer Structure Parameters for Human Body Dynamics Measurements

Identification of Capacitive MEMS Accelerometer Structure Parameters for Human Body Dynamics Measurements

Due to their small size, low weight, low cost and low energy consumption, MEMS accelerometers have achieved great commercial success in recent decades. The aim of this research work is to identify a MEMS accelerometer structure for human body dynamics measurements. Photogrammetry was used in order t...

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Bibliographic Details
Main Authors: Vincas Benevicius, Rimvydas Gaidys, Vytautas Ostasevicius
Format: Article
Language:English
Published: MDPI AG 2013-08-01
Series:Sensors
Subjects:
capacitive
accelerometer
MEMS
optimization
proof-mass
L-shaped beam
Online Access:http://www.mdpi.com/1424-8220/13/9/11184

Internet

http://www.mdpi.com/1424-8220/13/9/11184

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