Prediction of Gap Asymmetry in Differential Micro Accelerometers

Prediction of Gap Asymmetry in Differential Micro Accelerometers

Gap asymmetry in differential capacitors is the primary source of the zero bias output of force-balanced micro accelerometers. It is also used to evaluate the applicability of differential structures in MEMS manufacturing. Therefore, determining the asymmetry level has considerable significance for...

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Bibliographic Details
Main Authors: Xiaoping He, Wei Su, Wu Zhou, Bei Peng, Baili Li
Format: Article
Language:English
Published: MDPI AG 2012-05-01
Series:Sensors
Subjects:
MEMS
accelerometer
asymmetry
analytical method
Online Access:http://www.mdpi.com/1424-8220/12/6/6857

Internet

http://www.mdpi.com/1424-8220/12/6/6857

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