A Cylindrical Triode Ultrahigh Vacuum Ionization Gauge with a Carbon Nanotube Cathode
In this study, a cylindrical triode ultrahigh vacuum ionization gauge with a screen-printed carbon nanotube (CNT) electron source was developed, and its metrological performance in different gases was systematically investigated using an ultrahigh vacuum system. The resulting ionization gauge with a...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-06-01
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Series: | Nanomaterials |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-4991/11/7/1636 |