Design, Development and Implementation of the Position Estimator Algorithm for Harmonic Motion on the XY Flexural Mechanism for High Precision Positioning
This article presents a novel concept of the position estimator algorithm for voice coil actuators used in precision scanning applications. Here, a voice coil motor was used as an actuator and a sensor using the position estimator algorithm, which was derived from an electro-mechanical model of a vo...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-01-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/20/3/662 |