A Sensor Fusion Algorithm for Filtering Pyrometer Measurement Noise in the Czochralski Crystallization Process
The Czochralski (CZ) crystallization process is used to produce monocrystalline silicon for solar cell wafers and electronics. Tight temperature control of the molten silicon is most important for achieving high crystal quality. SINTEF Materials and Chemistry operates a CZ process. During one CZ bat...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Norwegian Society of Automatic Control
2011-01-01
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| Series: | Modeling, Identification and Control |
| Subjects: | |
| Online Access: | http://www.mic-journal.no/PDF/2011/MIC-2011-1-2.pdf |