Numerical Analysis of an Inline Metal-Organic Chemical Vapour Deposition Process Based on Sliding-Mesh Modelling

The flow behaviour under the influence of susceptor moving speed is a key factor for the fabrication of high-quality cadmium telluride (CdTe) thin films during the inline metal-organic chemical vapour deposition (MOCVD) process. The main purpose of this paper is to find a method to study the real-ti...

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Bibliographic Details
Main Authors: Xiaosong Zhou, Yiyi Wu, Xiaogang Yang, Chaowen Huang
Format: Article
Language:English
Published: MDPI AG 2020-12-01
Series:Coatings
Subjects:
Online Access:https://www.mdpi.com/2079-6412/10/12/1198