Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing

Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing

Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing. It is demonstrated that the gas stream action itself modifies the device resonance frequency in a way that depends on the resonator...

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Bibliographic Details
Main Authors: Rafel Perello-Roig, Jaume Verd, Sebastià Bota, Jaume Segura
Format: Article
Language:English
Published: MDPI AG 2020-08-01
Series:Sensors
Subjects:
MEMS resonators
VOCs
temperature sensitivity
CMOS-MEMS
gas sensors
Online Access:https://www.mdpi.com/1424-8220/20/17/4663

Internet

https://www.mdpi.com/1424-8220/20/17/4663

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