THE FEATURES OF SCANNING LIQUID PHASE EPITAXY TECHNIQUE AS APPLIED TO THICK EPITAXIAL LAYERS GROWTH
Background. Growing of both thin and thick epitaxial layers is an essential part of semiconductor device technology. Liquid phase epitaxy is among well-known technological methods. There are pulse methods of liquid phase epitaxy specially developed for obtaining thin epitaxial layers. Their adaptati...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Igor Sikorsky Kyiv Polytechnic Institute
2020-08-01
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| Series: | KPI Science News |
| Subjects: | |
| Online Access: | http://scinews.kpi.ua/article/view/197877 |