A Digital Closed-Loop Sense MEMS Disk Resonator Gyroscope Circuit Design Based on Integrated Analog Front-end

A Digital Closed-Loop Sense MEMS Disk Resonator Gyroscope Circuit Design Based on Integrated Analog Front-end

A digital closed-loop system design of a microelectromechanical systems (MEMS) disk resonator gyroscope (DRG) is proposed in this paper. Vibration models with non-ideal factors are provided based on the structure characteristics and operation mode of the sensing element. The DRG operates in force ba...

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Bibliographic Details
Main Authors: Yihang Wang, Qiang Fu, Yufeng Zhang, Wenbo Zhang, Dongliang Chen, Liang Yin, Xiaowei Liu
Format: Article
Language:English
Published: MDPI AG 2020-01-01
Series:Sensors
Subjects:
disk resonator gyroscope (drg)
mems
digital control loop
Online Access:https://www.mdpi.com/1424-8220/20/3/687

Internet

https://www.mdpi.com/1424-8220/20/3/687

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