Reduction of Liquid Bridge Force for 3D Microstructure Measurements

Reduction of Liquid Bridge Force for 3D Microstructure Measurements

Recent years have witnessed an increased demand for a method for precise measurement of the microstructures of mechanical microparts, microelectromechanical systems, micromolds, optical devices, microholes, etc. This paper presents a measurement system for three-dimensional (3D) microstructures that...

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Bibliographic Details
Main Authors: Hiroshi Murakami, Akio Katsuki, Takao Sajima, Mitsuyoshi Fukuda
Format: Article
Language:English
Published: MDPI AG 2016-05-01
Series:Applied Sciences
Subjects:
surface force
van der Waals force
electrostatic force
liquid bridge force
microstructure
measurement
optical fiber probe
laser diode
coordinate measuring machine (CMM)
Online Access:http://www.mdpi.com/2076-3417/6/5/153

Internet

http://www.mdpi.com/2076-3417/6/5/153

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