Design of Diaphragm Based MEMS Pressure Sensor with Sensitivity Analysis for Environmental Applications
In this paper Micro-electromechanical System (MEMS) diaphragm based pressure sensor for environmental applications is discussed. The main focus of this paper is to design, simulate and analyze the sensitivity of MEMS based diaphragm using different structures to measure the low and high pressure val...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2015-05-01
|
| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/may_2015/Vol_188/P_2659.pdf |