Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy

Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy

This study aims to develop a X-Y dual-axial intelligent servo pneumatic-piezoelectric hybrid actuator for position control with high response, large stroke (250 mm, 200 mm) and nanometer accuracy (20 nm). In each axis, the rodless pneumatic actuator serves to position in coarse stroke and the piezoe...

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Bibliographic Details
Main Author: Mao-Hsiung Chiang
Format: Article
Language:English
Published: MDPI AG 2010-03-01
Series:Sensors
Subjects:
pneumatic-piezoelectric hybrid actuator
piezoelectric
pneumatic
position control
decoupling self-organizing fuzzy sliding mode control and dual-input single-output
Online Access:http://www.mdpi.com/1424-8220/10/4/2675/

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http://www.mdpi.com/1424-8220/10/4/2675/

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