Pulsed 1064 nm Nd-YAG Laser Deposition of Titanium on Silicon in a Nitrogen Environment
Pulsed laser deposition (PLD) technique was demonstrated for the deposition of titanium nitride (TiN) thin films on Si (100) substrates. A 1064 nm pulsed Nd-YAG laser is focused on a titanium (99.5%) target in a nitrogen environment to generate the atomic flux needed for the film deposition. Spectro...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
University of the Philippines
1999-12-01
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| Series: | Science Diliman |
| Subjects: | |
| Online Access: | http://journals.upd.edu.ph/index.php/sciencediliman/article/view/241 |