Effect of Irrelevant Variables on Faulty Wafer Detection in Semiconductor Manufacturing
Machine learning has been applied successfully for faulty wafer detection tasks in semiconductor manufacturing. For the tasks, prediction models are built with prior data to predict the quality of future wafers as a function of their precedent process parameters and measurements. In real-world probl...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-07-01
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| Series: | Energies |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1996-1073/12/13/2530 |