A Piezoelectric Resonance Pump Based on a Flexible Support
Small volume changes are important factors that restrict the improvement of the performance of a piezoelectric diaphragm pump. In order to increase the volume change of the pump chamber, a square piezoelectric vibrator with a flexible support is proposed in this paper and used as the driving unit of...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2019-02-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/10/3/169 |