Research On The Measure Method Of Oblique Pinhole Parameters
There are many special advantages in measuring the diameter of blind and deep holes with a capacitive probe, there are still some challenges for the measurement of a oblique pinhole parameters because the measuring device is inconvenient to stretch into the oblique pinhole exactly. A five-dimensiona...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2016-01-01
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| Series: | ITM Web of Conferences |
| Online Access: | http://dx.doi.org/10.1051/itmconf/20160709023 |