Humidity Control for Front Opening Unified Pod after Opening Its Door in a Mini-Environment
Wafers are usually placed in a front opening unified pod (FOUP) while waiting in the line of manufacturing processes; a conventional way for preventing (or removing) contamination is to purge an FOUP with a gas, so as to maintain the cleanliness level. This study investigates the effect of the flow...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-07-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2076-3417/8/7/1149 |