A Study on Measurement Variations in Resonant Characteristics of Electrostatically Actuated MEMS Resonators

A Study on Measurement Variations in Resonant Characteristics of Electrostatically Actuated MEMS Resonators

Microelectromechanical systems (MEMS) resonators require fast, accurate, and cost-effective testing for mass production. Among the different test methods, frequency domain analysis is one of the easiest and fastest. This paper presents the measurement uncertainties in electrostatically actuated MEMS...

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Bibliographic Details
Main Authors: Faisal Iqbal, Byeungleul Lee
Format: Article
Language:English
Published: MDPI AG 2018-04-01
Series:Micromachines
Subjects:
electrostatic actuation
MEMS resonator
measurement variation
frequency domain
resonant characteristics
Online Access:http://www.mdpi.com/2072-666X/9/4/173

Internet

http://www.mdpi.com/2072-666X/9/4/173

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