Near-IR Spectral Imaging of Semiconductor Absorption Sites in Integrated Circuits
We derive spectral maps of absorption sites in integrated circuits (ICs) by varying the wavelength of the optical probe within the near-IR range. This method has allowed us to improve the contrast of the acquired images by revealing structures that have a different optical absorption from neighborin...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
University of the Philippines
2004-12-01
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| Series: | Science Diliman |
| Subjects: | |
| Online Access: | http://journals.upd.edu.ph/index.php/sciencediliman/article/view/117 |