INVESTIGATIONS OF THIN TITANIUM OXIDE FILMS GROWN BY REACTIVE PULSED LASER DEPOSITION

INVESTIGATIONS OF THIN TITANIUM OXIDE FILMS GROWN BY REACTIVE PULSED LASER DEPOSITION

Titanium oxide thin films were deposited on Si monocrystalline substrate using the pulsed laser ablation technique in a reactive oxygen atmosphere. The films were obtained starting from Ti and TiO2 targets which were ablated using a KrF* excimer laser (λ = 248 nm). During the deposition, the Si su...

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Bibliographic Details
Main Authors: Gabriela Dorcioman, Oana Fufa, Valentin Craciun, Marimona Miroiu, Petronela Garoi, Emanuel Axente, Felix Sima, Doina Craciun
Format: Article
Language:English
Published: Romanian Society of Oral Rehabilitation 2018-11-01
Series:Romanian Journal of Oral Rehabilitation
Subjects:
titanium oxide
thin films
pulsed laser deposition
Online Access:http://www.rjor.ro/wp-content/uploads/2018/09/INVESTIGATIONS-OF-THIN-TITANIUM-OXIDE-FILMS-GROWN-BY-REACTIVE-PULSED-LASER-DEPOSITION.pdfRJOR.pdf

Internet

http://www.rjor.ro/wp-content/uploads/2018/09/INVESTIGATIONS-OF-THIN-TITANIUM-OXIDE-FILMS-GROWN-BY-REACTIVE-PULSED-LASER-DEPOSITION.pdfRJOR.pdf

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