Analysis of low frequency noise in in situ fluorine-doped ZnSnO thin-film transistors
We report on in situ fluorine-doped ZnSnO (ZTO:F) thin-film transistors (TFTs) fabricated by co-sputtering. The low frequency noise (LFN) characteristics of ZTO:F TFTs under different annealing temperatures and FSnO (FTO) deposition powers are comparatively studied for the first time. The results sh...
Main Authors: | , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2021-04-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/5.0048125 |