Quality improvement of ZnO thin layers overgrown on Si(100) substrates at room temperature by nitridation pretreatment
To improve the quality of ZnO thin film overgrown on Si(100) substrate at RT (room temperature), the Si(100) surface was pretreated with different methods. The influence of interface on the overgrown ZnO layers was investigated by atomic force microscopy, photoluminescence and X-ray diffraction. We...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2012-06-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4723852 |